P

Inventor

PATEL HRISHIKESH

NL10 patents
⚠️ This page may combine multiple inventors who share the name “PATEL HRISHIKESH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

6 patents
US11231646B2Jan 25, 2022

Pellicle and pellicle assembly

ASML NETHERLANDS BV1 citations70
US12117726B2Oct 15, 2024

Pellicle and pellicle assembly

ASML NETHERLANDS BV0 citations59
US11754918B2Sep 12, 2023

Pellicle and pellicle assembly

ASML NETHERLANDS BV0 citations59
USRE49297ENov 15, 2022

Lithographic apparatus and a device manufacturing method

ASML NETHERLANDS BV0 citations59
US10191377B2Jan 29, 2019

Lithographic apparatus and a device manufacturing method

ASML NETHERLANDS BV0 citations49
US12572078B2Mar 10, 2026

Radiation source module and lithographic apparatus

ASML NETHERLANDS BV0 citations44

PATEL HRISHIKESH

2 patents
US8472003B2Jun 25, 2013

Fluid handling structure, lithographic apparatus and device manufacturing method

PATEL HRISHIKESH5 citations67
US9618858B2Apr 11, 2017

Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table

PATEL HRISHIKESH0 citations48

SCHEPERS MAIKEL ADRIANUS CORNELIS

1 patent
US8680493B2Mar 25, 2014

Radiation conduit for radiation source

SCHEPERS MAIKEL ADRIANUS CORNELIS3 citations50

LAFARRE RAYMOND WILHELMUS LOUIS

1 patent
US8941815B2Jan 27, 2015

Substrate table for a lithographic apparatus, lithographic apparatus, method of using a substrate table and device manufacturing method

LAFARRE RAYMOND WILHELMUS LOUIS0 citations36