Inventor
VAN DER HAM RONALD
NL34 patents
⚠️ This page may combine multiple inventors who share the name “VAN DER HAM RONALD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
20 patentsUS7253875B1Aug 7, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV166 citations98
US7057702B2Jun 6, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV89 citations96
US7561250B2Jul 14, 2009
Lithographic apparatus having parts with a coated film adhered thereto
ASML NETHERLANDS BV9 citations82
US7924399B2Apr 12, 2011
Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods
ASML NETHERLANDS BV6 citations73
US10222707B2Mar 5, 2019
Lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV3 citations72
US10520837B2Dec 31, 2019
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations71
US10551748B2Feb 4, 2020
Fluid handling structure, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV3 citations69
US7432513B2Oct 7, 2008
Gas shower, lithographic apparatus and use of a gas shower
ASML NETHERLANDS BV2 citations62
US12072636B2Aug 27, 2024
Fluid handling system and lithographic apparatus
ASML NETHERLANDS BV1 citations61
US11300890B2Apr 12, 2022
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations61
US10916453B2Feb 9, 2021
Lithographic apparatus, method of transferring a substrate and device manufacturing method
ASML NETHERLANDS BV0 citations57
US7136142B2Nov 14, 2006
Lithographic apparatus having a gas flushing device
ASML NETHERLANDS BV2 citations57
US10001712B2Jun 19, 2018
Immersion lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US7728951B2Jun 1, 2010
Lithographic apparatus and method for conditioning an interior space of a device manufacturing apparatus
ASML NETHERLANDS BV0 citations51
US7227612B2Jun 5, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US10268127B2Apr 23, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US9645506B2May 9, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US10859919B2Dec 8, 2020
Fluid handling structure, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations48
US10409174B2Sep 10, 2019
Lithographic apparatus, method of transferring a substrate and device manufacturing method
ASML NETHERLANDS BV0 citations47
US10324384B2Jun 18, 2019
Lithographic apparatus and a method of manufacturing a lithographic apparatus
ASML NETHERLANDS BV0 citations40
STEFFENS KOEN
2 patentsVAN DER HAM RONALD
2 patentsUS8711326B2Apr 29, 2014
Fluid handling structure, a lithographic apparatus and a device manufacturing method
VAN DER HAM RONALD2 citations56
US8441610B2May 14, 2013
Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods
VAN DER HAM RONALD0 citations48