Inventor
SIMONS WILHELMUS FRANCISCUS JOHANNES
NL22 patents
⚠️ This page may combine multiple inventors who share the name “SIMONS WILHELMUS FRANCISCUS JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
13 patentsUS7710540B2May 4, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV94 citations97
US9785055B2Oct 10, 2017
Object holder and lithographic apparatus
ASML NETHERLANDS BV7 citations83
US7561250B2Jul 14, 2009
Lithographic apparatus having parts with a coated film adhered thereto
ASML NETHERLANDS BV9 citations82
US10222707B2Mar 5, 2019
Lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV3 citations72
US9915877B2Mar 13, 2018
Object holder and lithographic apparatus
ASML NETHERLANDS BV3 citations72
US9927721B2Mar 27, 2018
Object positioning system, control system, lithographic apparatus, object positioning method and device manufacturing method
ASML NETHERLANDS BV2 citations68
US7630059B2Dec 8, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations62
US7948609B2May 24, 2011
Lithographic apparatus, stage system and stage control method
ASML NETHERLANDS BV3 citations58
US10248027B2Apr 2, 2019
Projection system
ASML NETHERLANDS BV1 citations56
US10481502B2Nov 19, 2019
Object holder and lithographic apparatus
ASML NETHERLANDS BV0 citations51
US10268127B2Apr 23, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US9645506B2May 9, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US10962890B2Mar 30, 2021
Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing method
ASML NETHERLANDS BV0 citations45
HEERTJES MARCEL FRANCOIS
2 patentsUS8135488B2Mar 13, 2012
Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device
HEERTJES MARCEL FRANCOIS2 citations54
US8452442B2May 28, 2013
Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device
HEERTJES MARCEL FRANCOIS0 citations44