Inventor

BERKVENS PAUL PETRUS JOANNES

NL13 patents

⚠️ This page may combine multiple inventors who share the name “BERKVENS PAUL PETRUS JOANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

4 patents

US7710540B2May 4, 2010

PHILIPS DANNY MARIA HUBERTUS

2 patents

US8405815B2Mar 26, 2013

Fluid handling structure, lithographic apparatus and device manufacturing method

PHILIPS DANNY MARIA HUBERTUS1 citations46

US8638417B2Jan 28, 2014

Fluid handling structure, lithographic apparatus and a device manufacturing method

PHILIPS DANNY MARIA HUBERTUS1 citations45

STREEFKERK BOB

1 patent

US8587762B2Nov 19, 2013

Methods relating to immersion lithography and an immersion lithographic apparatus

STREEFKERK BOB15 citations83

RIEPEN MICHEL

1 patent

US8634053B2Jan 21, 2014

Lithographic apparatus and device manufacturing method

RIEPEN MICHEL12 citations82

DIRECKS DANIEL JOZEF MARIA

1 patent

US8421993B2Apr 16, 2013

Fluid handling structure, lithographic apparatus and device manufacturing method

DIRECKS DANIEL JOZEF MARIA14 citations80

PATEL HRISHIKESH

1 patent

US8472003B2Jun 25, 2013

Fluid handling structure, lithographic apparatus and device manufacturing method

PATEL HRISHIKESH5 citations67

KEMPER NICOLAAS RUDOLF

1 patent

US8654309B2Feb 18, 2014

Fluid extraction system, lithographic apparatus and device manufacturing method

KEMPER NICOLAAS RUDOLF3 citations60

DE METSENAERE CHRISTOPHE

1 patent

US8786830B2Jul 22, 2014

Immersion lithographic apparatus including a pressure sensor to measure pressure of the immersion liquid and a device manufacturing method

DE METSENAERE CHRISTOPHE2 citations53

BERKVENS PAUL PETRUS JOANNES

1 patent

US8681308B2Mar 25, 2014

Lithographic apparatus and device manufacturing method

BERKVENS PAUL PETRUS JOANNES1 citations44