Inventor

VAN LIEROP MATHEUS ANNA KAREL

NL5 patents

⚠️ This page may combine multiple inventors who share the name “VAN LIEROP MATHEUS ANNA KAREL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US12197140B2Jan 14, 2025

Substrate table, immersion lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations61

US11215933B2Jan 4, 2022

Substrate table, immersion lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations61

US10451980B2Oct 22, 2019

Substrate table, immersion lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations50

STAVENGA MARCO KOERT

1 patent

US9059228B2Jun 16, 2015

Substrate table, immersion lithographic apparatus and device manufacturing method

STAVENGA MARCO KOERT6 citations81

PATEL HRISHIKESH

1 patent

US8472003B2Jun 25, 2013

Fluid handling structure, lithographic apparatus and device manufacturing method

PATEL HRISHIKESH5 citations67