Inventor
BLOKS RUUD HENDRIKUS MARTINUS JOHANNES
NL28 patents
⚠️ This page may combine multiple inventors who share the name “BLOKS RUUD HENDRIKUS MARTINUS JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
23 patentsUS9823589B2Nov 21, 2017
Lithographic apparatus and method
ASML NETHERLANDS BV5 citations83
US9785055B2Oct 10, 2017
Object holder and lithographic apparatus
ASML NETHERLANDS BV7 citations83
US9915877B2Mar 13, 2018
Object holder and lithographic apparatus
ASML NETHERLANDS BV3 citations72
US10520837B2Dec 31, 2019
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations71
US10222713B2Mar 5, 2019
Patterning device cooling apparatus
ASML NETHERLANDS BV2 citations71
US10394139B2Aug 27, 2019
Patterning device cooling apparatus
ASML NETHERLANDS BV2 citations68
US11300890B2Apr 12, 2022
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations61
US10990025B2Apr 27, 2021
Patterning device cooling apparatus
ASML NETHERLANDS BV0 citations61
US9513568B2Dec 6, 2016
Lithographic apparatus
ASML NETHERLANDS BV2 citations61
US11846879B2Dec 19, 2023
Method of unloading an object from a support table
ASML NETHERLANDS BV0 citations59
US11774869B2Oct 3, 2023
Method and system for determining overlay
ASML NETHERLANDS BV0 citations59
US11500296B2Nov 15, 2022
Method of unloading an object from a support table
ASML NETHERLANDS BV0 citations59
USRE49142EJul 19, 2022
Lithographic apparatus and an object positioning system
ASML NETHERLANDS BV0 citations59
US11175594B2Nov 16, 2021
Method of unloading an object from a support table
ASML NETHERLANDS BV0 citations59
US10508896B2Dec 17, 2019
Measurement substrate and a measurement method
ASML NETHERLANDS BV1 citations59
US10788763B2Sep 29, 2020
Lithographic apparatus
ASML NETHERLANDS BV0 citations51
US10481502B2Nov 19, 2019
Object holder and lithographic apparatus
ASML NETHERLANDS BV0 citations51
US10203611B2Feb 12, 2019
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations51
US12346032B2Jul 1, 2025
System, lithographic apparatus and method
ASML NETHERLANDS BV0 citations50
US10591828B2Mar 17, 2020
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations49
US10642166B2May 5, 2020
Patterning device cooling apparatus
ASML NETHERLANDS BV0 citations48
US9939738B2Apr 10, 2018
Lithographic apparatus and an object positioning system
ASML NETHERLANDS BV0 citations48
US10534271B2Jan 14, 2020
Lithography apparatus and a method of manufacturing a device
ASML NETHERLANDS BV0 citations34