Inventor
SPENCE DANIEL P
US33 patents
⚠️ This page may combine multiple inventors who share the name “SPENCE DANIEL P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AIR PROD & CHEM
13 patentsUS9337018B2May 10, 2016
Methods for depositing films with organoaminodisilane precursors
AIR PROD & CHEM15 citations92
US10421766B2Sep 24, 2019
Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films
AIR PROD & CHEM5 citations84
US9200167B2Dec 1, 2015
Alkoxyaminosilane compounds and applications thereof
AIR PROD & CHEM10 citations84
US7723493B2May 25, 2010
Metal complexes of tridentate BETA -ketoiminates
AIR PROD & CHEM12 citations84
US7691984B2Apr 6, 2010
Metal complexes of tridentate β-ketoiminates
AIR PROD & CHEM10 citations84
US9796739B2Oct 24, 2017
AZA-polysilane precursors and methods for depositing films comprising same
AIR PROD & CHEM6 citations73
US9613799B2Apr 4, 2017
Methods for depositing films with organoaminodisilane precursors
AIR PROD & CHEM1 citations63
US10170297B2Jan 1, 2019
Compositions and methods using same for flowable oxide deposition
AIR PROD & CHEM1 citations62
US10279959B2May 7, 2019
Alkoxysilylamine compounds and applications thereof
AIR PROD & CHEM0 citations52
US9978585B2May 22, 2018
Organoaminodisilane precursors and methods for depositing films comprising same
AIR PROD & CHEM1 citations52
US7919409B2Apr 5, 2011
Materials for adhesion enhancement of copper film on diffusion barriers
AIR PROD & CHEM1 citations50
US9809711B2Nov 7, 2017
Catalyst and formulations comprising same for alkoxysilanes hydrolysis reaction in semiconductor process
AIR PROD & CHEM0 citations42
US9677178B2Jun 13, 2017
Alkoxyaminosilane compounds and applications thereof
AIR PROD & CHEM0 citations42
VERSUM MAT US LLC
8 patentsUS10899500B2Jan 26, 2021
Alkoxysilylamine compounds and applications thereof
VERSUM MAT US LLC5 citations73
US11735413B2Aug 22, 2023
Precursors and flowable CVD methods for making low-k films to fill surface features
VERSUM MAT US LLC1 citations62
US11142658B2Oct 12, 2021
Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films
VERSUM MAT US LLC0 citations62
US11043374B2Jun 22, 2021
Silacycloalkane compounds and methods for depositing silicon containing films using same
VERSUM MAT US LLC0 citations52
US10283350B2May 7, 2019
Methods for depositing films with organoaminodisilane precursors
VERSUM MAT US LLC0 citations52
US9997350B2Jun 12, 2018
Methods for depositing films with organoaminodisilane precursors
VERSUM MAT US LLC0 citations52
US12441747B2Oct 14, 2025
Silicon compounds and methods for depositing films using same
VERSUM MAT US LLC0 citations51
US11591692B2Feb 28, 2023
Organoamino-polysiloxanes for deposition of silicon-containing films
VERSUM MAT US LLC0 citations51
LEI XINJIAN
6 patentsUS8471049B2Jun 25, 2013
Precursors for depositing group 4 metal-containing films
LEI XINJIAN8 citations82
US8617305B2Dec 31, 2013
Metal complexes for metal-containing film deposition
LEI XINJIAN6 citations72
US8592606B2Nov 26, 2013
Liquid precursor for depositing group 4 metal containing films
LEI XINJIAN0 citations51
US9079923B2Jul 14, 2015
Multidentate ketoimine ligands for metal complexes
LEI XINJIAN0 citations40
US8722933B2May 13, 2014
Method for preparing metal complexes of polydentate beta-ketoiminates
LEI XINJIAN0 citations40
US8247617B2Aug 21, 2012
Group 2 metal precursors for depositing multi-component metal oxide films
LEI XINJIAN0 citations33
IVANOV SERGEI VLADIMIROVICH
3 patentsUS8952188B2Feb 10, 2015
Group 4 metal precursors for metal-containing films
IVANOV SERGEI VLADIMIROVICH0 citations49
US8642797B2Feb 4, 2014
Amidate precursors for depositing metal containing films
IVANOV SERGEI VLADIMIROVICH1 citations48
US8507704B2Aug 13, 2013
Liquid composition containing aminoether for deposition of metal-containing films
IVANOV SERGEI VLADIMIROVICH0 citations38