Inventor
SCOTNEY-CASTLE MATTHEW D
US22 patents
⚠️ This page may combine multiple inventors who share the name “SCOTNEY-CASTLE MATTHEW D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
13 patentsUS9852902B2Dec 26, 2017
Material deposition for high aspect ratio structures
APPLIED MATERIALS INC3 citations72
US11348769B2May 31, 2022
Plasma-enhanced anneal chamber for wafer outgassing
APPLIED MATERIALS INC5 citations71
US10770272B2Sep 8, 2020
Plasma-enhanced anneal chamber for wafer outgassing
APPLIED MATERIALS INC5 citations71
US8354035B2Jan 15, 2013
Method for removing implanted photo resist from hard disk drive substrates
APPLIED MATERIALS INC4 citations62
US7659184B2Feb 9, 2010
Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking
APPLIED MATERIALS INC3 citations61
US12230521B2Feb 18, 2025
Method for non-contact low substrate temperature measurement
APPLIED MATERIALS INC0 citations60
US9646642B2May 9, 2017
Resist fortification for magnetic media patterning
APPLIED MATERIALS INC0 citations52
US10276369B2Apr 30, 2019
Material deposition for high aspect ratio structures
APPLIED MATERIALS INC0 citations51
US10233538B2Mar 19, 2019
Demagnetization of magnetic media by C doping for HDD patterned media application
APPLIED MATERIALS INC0 citations51
US9553174B2Jan 24, 2017
Conversion process utilized for manufacturing advanced 3D features for semiconductor device applications
APPLIED MATERIALS INC0 citations51
US8003500B2Aug 23, 2011
Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking
APPLIED MATERIALS INC1 citations51
US7989329B2Aug 2, 2011
Removal of surface dopants from a substrate
APPLIED MATERIALS INC1 citations51
US10500614B2Dec 10, 2019
Temperature controlled remote plasma clean for exhaust deposit removal
APPLIED MATERIALS INC0 citations41