Inventor

BHATIA SIDHARTH

US27 patents

⚠️ This page may combine multiple inventors who share the name “BHATIA SIDHARTH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BHATIA SIDHARTH

APPLIED MATERIALS INC

Portion of a display panel with a graphical user interface

Portion of a display panel with a graphical user interface

Prescriptive analytics in highly collinear response space

Plasma parameters and skew characterization by high speed imaging

Sensor metrology data integration

Part, sensor, and metrology data integration

Prescriptive analytics in highly collinear response space

Plasma parameters and skew characterization by high speed imaging

Plasma density control on substrate edge

Apparatus and methods for removing contaminant particles in a plasma process

Smart dynamic load simulator for RF power delivery control system

Sensor metrology data integration

Portion of a display panel with a graphical user interface

Predictive modeling of a manufacturing process using a set of trained inverted models

Apparatus and methods for removing contaminant particles in a plasma process

In-situ etch rate determination for chamber clean endpoint

Plasma density control on substrate edge

Adjusting chamber performance by equipment constant updates

Determining equipment constant updates by machine learning

Chamber matching by equipment constant updates

Process development visualization tool

Physically-informed multi-system hardware operating windows

Process characterization and correction using optical wall process sensor (OWPS)

Process characterization and correction using optical wall process sensor (OWPS)

RPS defect reduction by cyclic clean induced RPS cooling

BHATIA SIDHARTH

Two silicon-containing precursors for gapfill enhancing dielectric liner

Reduced pattern loading using silicon oxide multi-layers