Inventor
PATEL ANJANA M
US11 patents
⚠️ This page may combine multiple inventors who share the name “PATEL ANJANA M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS7967913B2Jun 28, 2011
Remote plasma clean process with cycled high and low pressure clean steps
APPLIED MATERIALS INC477 citations98
US7628897B2Dec 8, 2009
Reactive ion etching for semiconductor device feature topography modification
APPLIED MATERIALS INC230 citations98
US7935643B2May 3, 2011
Stress management for tensile films
APPLIED MATERIALS INC48 citations94
US12488981B2Dec 2, 2025
Systems and methods for deposition residue control
APPLIED MATERIALS INC0 citations62
US11948790B2Apr 2, 2024
Heater support kit for bevel etch chamber
APPLIED MATERIALS INC0 citations62
US10903066B2Jan 26, 2021
Heater support kit for bevel etch chamber
APPLIED MATERIALS INC1 citations62
US11699577B2Jul 11, 2023
Treatment for high-temperature cleans
APPLIED MATERIALS INC0 citations60
US9589773B2Mar 7, 2017
In-situ etch rate determination for chamber clean endpoint
APPLIED MATERIALS INC1 citations51
US11560623B2Jan 24, 2023
Methods of reducing chamber residues
APPLIED MATERIALS INC0 citations48
US10755903B2Aug 25, 2020
RPS defect reduction by cyclic clean induced RPS cooling
APPLIED MATERIALS INC0 citations39