Inventor
SAENGER KATHERINE L
US100 patents
⚠️ This page may combine multiple inventors who share the name “SAENGER KATHERINE L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
41 patentsUS5433651AJul 18, 1995
In-situ endpoint detection and process monitoring method and apparatus for chemical-mechanical polishing
IBM758 citations99
US7125785B2Oct 24, 2006
Mixed orientation and mixed material semiconductor-on-insulator wafer
IBM102 citations98
US7060585B1Jun 13, 2006
Hybrid orientation substrates by in-place bonding and amorphization/templated recrystallization
IBM75 citations98
US6774010B2Aug 10, 2004
Transferable device-containing layer for silicon-on-insulator applications
IBM376 citations98
US7361991B2Apr 22, 2008
Closed air gap interconnect structure
IBM67 citations97
US6975032B2Dec 13, 2005
Copper recess process with application to selective capping and electroless plating
IBM85 citations97
US7968459B2Jun 28, 2011
Ion implantation combined with in situ or ex situ heat treatment for improved field effect transistors
IBM104 citations96
US6967131B2Nov 22, 2005
Field effect transistor with electroplated metal gate
IBM43 citations96
US5633781AMay 27, 1997
Isolated sidewall capacitor having a compound plate electrode
IBM55 citations96
US5828131AOct 27, 1998
Low temperature formation of low resistivity titanium silicide
IBM60 citations94
US7547616B2Jun 16, 2009
Laser processing method for trench-edge-defect-free solid phase epitaxy in confined geometrics
IBM30 citations93
US7534696B2May 19, 2009
Multilayer interconnect structure containing air gaps and method for making
IBM42 citations93
US7071122B2Jul 4, 2006
Field effect transistor with etched-back gate dielectric
IBM42 citations93
US6930034B2Aug 16, 2005
Robust ultra-low k interconnect structures using bridge-then-metallization fabrication sequence
IBM43 citations93
US5585998ADec 17, 1996
Isolated sidewall capacitor with dual dielectric
IBM42 citations93
US7525162B2Apr 28, 2009
Orientation-optimized PFETS in CMOS devices employing dual stress liners
IBM24 citations92
US7393776B2Jul 1, 2008
Method of forming closed air gap interconnects and structures formed thereby
IBM26 citations92
US7309649B2Dec 18, 2007
Method of forming closed air gap interconnects and structures formed thereby
IBM33 citations92
US7256670B2Aug 14, 2007
Diaphragm activated micro-electromechanical switch
IBM32 citations92
US7064064B2Jun 20, 2006
Copper recess process with application to selective capping and electroless plating
IBM22 citations92
US7064050B2Jun 20, 2006
Metal carbide gate structure and method of fabrication
IBM32 citations92
US7038277B2May 2, 2006
Transferable device-containing layer for silicon-on-insulator applications
IBM22 citations92
US7112851B2Sep 26, 2006
Field effect transistor with electroplated metal gate
IBM36 citations91
US9705013B2Jul 11, 2017
Crack-tolerant photovoltaic cell structure and fabrication method
IBM5 citations84
US9496165B1Nov 15, 2016
Method of forming a flexible semiconductor layer and devices on a flexible carrier
IBM6 citations84
US9455179B1Sep 27, 2016
Methods to reduce debonding forces on flexible semiconductor films disposed on vapor-releasing adhesives
IBM8 citations84
US8828762B2Sep 9, 2014
Carbon nanostructure device fabrication utilizing protect layers
IBM10 citations84
US8723233B2May 13, 2014
CMOS with channel P-FinFET and channel N-FinFET having different crystalline orientations and parallel fins
IBM5 citations84
US7868410B2Jan 11, 2011
Gate stack engineering by electrochemical processing utilizing through-gate-dielectric current flow
IBM13 citations84
US7785939B2Aug 31, 2010
Planar substrate with selected semiconductor crystal orientations formed by localized amorphization and recrystallization of stacked template layers
IBM9 citations84
US7667278B2Feb 23, 2010
Metal carbide gate structure and method of fabrication
IBM11 citations84
US7396407B2Jul 8, 2008
Trench-edge-defect-free recrystallization by edge-angle-optimized solid phase epitaxy: method and applications to hybrid orientation substrates
IBM9 citations84
US7368045B2May 6, 2008
Gate stack engineering by electrochemical processing utilizing through-gate-dielectric current flow
IBM10 citations84
US7253034B2Aug 7, 2007
Dual SIMOX hybrid orientation technology (HOT) substrates
IBM19 citations84
US6836029B2Dec 28, 2004
Micro-electromechanical switch having a conductive compressible electrode
IBM18 citations84
US7704852B2Apr 27, 2010
Amorphization/templated recrystallization method for hybrid orientation substrates
IBM4 citations74
US7291539B2Nov 6, 2007
Amorphization/templated recrystallization method for hybrid orientation substrates
IBM7 citations74
US9768288B2Sep 19, 2017
Carbon nanostructure device fabrication utilizing protect layers
IBM2 citations73
US9659807B2May 23, 2017
Method of forming a flexible semiconductor layer and devices on a flexible carrier
IBM2 citations73
US9548235B1Jan 17, 2017
Methods to reduce debonding forces on flexible semiconductor films disposed on vapor-releasing adhesives
IBM3 citations73
US6187679B1Feb 13, 2001
Low temperature formation of low resistivity titanium silicide
IBM9 citations72
COHEN GUY M
2 patentsUS8574969B2Nov 5, 2013
CMOS with channel P-FinFET and channel N-FinFET having different crystalline orientations and parallel fins
COHEN GUY M11 citations84
US8241970B2Aug 14, 2012
CMOS with channel P-FinFET and channel N-FinFET having different crystalline orientations and parallel fins
COHEN GUY M8 citations84
DE SOUZA JOEL P
2 patentsBEDELL STEPHEN W
1 patentCHEN ZHIHONG
1 patentPENG HONGBO
1 patentBOL AGEETH A
1 patentTYBERG CHRISTY S
1 patentShowing the top 50 of 100 patents by PatentIndex Score.