P

Inventor

SAENGER KATHERINE L

US100 patents
⚠️ This page may combine multiple inventors who share the name “SAENGER KATHERINE L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

41 patents
US5433651AJul 18, 1995

In-situ endpoint detection and process monitoring method and apparatus for chemical-mechanical polishing

IBM758 citations99
US7125785B2Oct 24, 2006

Mixed orientation and mixed material semiconductor-on-insulator wafer

IBM102 citations98
US7060585B1Jun 13, 2006

Hybrid orientation substrates by in-place bonding and amorphization/templated recrystallization

IBM75 citations98
US6774010B2Aug 10, 2004

Transferable device-containing layer for silicon-on-insulator applications

IBM376 citations98
US7361991B2Apr 22, 2008

Closed air gap interconnect structure

IBM67 citations97
US6975032B2Dec 13, 2005

Copper recess process with application to selective capping and electroless plating

IBM85 citations97
US7968459B2Jun 28, 2011

Ion implantation combined with in situ or ex situ heat treatment for improved field effect transistors

IBM104 citations96
US6967131B2Nov 22, 2005

Field effect transistor with electroplated metal gate

IBM43 citations96
US5633781AMay 27, 1997

Isolated sidewall capacitor having a compound plate electrode

IBM55 citations96
US5828131AOct 27, 1998

Low temperature formation of low resistivity titanium silicide

IBM60 citations94
US7547616B2Jun 16, 2009

Laser processing method for trench-edge-defect-free solid phase epitaxy in confined geometrics

IBM30 citations93
US7534696B2May 19, 2009

Multilayer interconnect structure containing air gaps and method for making

IBM42 citations93
US7071122B2Jul 4, 2006

Field effect transistor with etched-back gate dielectric

IBM42 citations93
US6930034B2Aug 16, 2005

Robust ultra-low k interconnect structures using bridge-then-metallization fabrication sequence

IBM43 citations93
US5585998ADec 17, 1996

Isolated sidewall capacitor with dual dielectric

IBM42 citations93
US7525162B2Apr 28, 2009

Orientation-optimized PFETS in CMOS devices employing dual stress liners

IBM24 citations92
US7393776B2Jul 1, 2008

Method of forming closed air gap interconnects and structures formed thereby

IBM26 citations92
US7309649B2Dec 18, 2007

Method of forming closed air gap interconnects and structures formed thereby

IBM33 citations92
US7256670B2Aug 14, 2007

Diaphragm activated micro-electromechanical switch

IBM32 citations92
US7064064B2Jun 20, 2006

Copper recess process with application to selective capping and electroless plating

IBM22 citations92
US7064050B2Jun 20, 2006

Metal carbide gate structure and method of fabrication

IBM32 citations92
US7038277B2May 2, 2006

Transferable device-containing layer for silicon-on-insulator applications

IBM22 citations92
US7112851B2Sep 26, 2006

Field effect transistor with electroplated metal gate

IBM36 citations91
US9705013B2Jul 11, 2017

Crack-tolerant photovoltaic cell structure and fabrication method

IBM5 citations84
US9496165B1Nov 15, 2016

Method of forming a flexible semiconductor layer and devices on a flexible carrier

IBM6 citations84
US9455179B1Sep 27, 2016

Methods to reduce debonding forces on flexible semiconductor films disposed on vapor-releasing adhesives

IBM8 citations84
US8828762B2Sep 9, 2014

Carbon nanostructure device fabrication utilizing protect layers

IBM10 citations84
US8723233B2May 13, 2014

CMOS with channel P-FinFET and channel N-FinFET having different crystalline orientations and parallel fins

IBM5 citations84
US7868410B2Jan 11, 2011

Gate stack engineering by electrochemical processing utilizing through-gate-dielectric current flow

IBM13 citations84
US7785939B2Aug 31, 2010

Planar substrate with selected semiconductor crystal orientations formed by localized amorphization and recrystallization of stacked template layers

IBM9 citations84
US7667278B2Feb 23, 2010

Metal carbide gate structure and method of fabrication

IBM11 citations84
US7396407B2Jul 8, 2008

Trench-edge-defect-free recrystallization by edge-angle-optimized solid phase epitaxy: method and applications to hybrid orientation substrates

IBM9 citations84
US7368045B2May 6, 2008

Gate stack engineering by electrochemical processing utilizing through-gate-dielectric current flow

IBM10 citations84
US7253034B2Aug 7, 2007

Dual SIMOX hybrid orientation technology (HOT) substrates

IBM19 citations84
US6836029B2Dec 28, 2004

Micro-electromechanical switch having a conductive compressible electrode

IBM18 citations84
US7704852B2Apr 27, 2010

Amorphization/templated recrystallization method for hybrid orientation substrates

IBM4 citations74
US7291539B2Nov 6, 2007

Amorphization/templated recrystallization method for hybrid orientation substrates

IBM7 citations74
US9768288B2Sep 19, 2017

Carbon nanostructure device fabrication utilizing protect layers

IBM2 citations73
US9659807B2May 23, 2017

Method of forming a flexible semiconductor layer and devices on a flexible carrier

IBM2 citations73
US9548235B1Jan 17, 2017

Methods to reduce debonding forces on flexible semiconductor films disposed on vapor-releasing adhesives

IBM3 citations73
US6187679B1Feb 13, 2001

Low temperature formation of low resistivity titanium silicide

IBM9 citations72

COHEN GUY M

2 patents

DE SOUZA JOEL P

2 patents

BEDELL STEPHEN W

1 patent

CHEN ZHIHONG

1 patent

PENG HONGBO

1 patent

BOL AGEETH A

1 patent

TYBERG CHRISTY S

1 patent

Showing the top 50 of 100 patents by PatentIndex Score.