Inventor
CUVALCI OLKAN
US12 patents
⚠️ This page may combine multiple inventors who share the name “CUVALCI OLKAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS9633889B2Apr 25, 2017
Substrate support with integrated vacuum and edge purge conduits
APPLIED MATERIALS INC10 citations83
US10857655B2Dec 8, 2020
Substrate support plate with improved lift pin sealing
APPLIED MATERIALS INC3 citations72
US9916994B2Mar 13, 2018
Substrate support with multi-piece sealing surface
APPLIED MATERIALS INC2 citations72
US9837250B2Dec 5, 2017
Hot wall reactor with cooled vacuum containment
APPLIED MATERIALS INC4 citations72
US9543186B2Jan 10, 2017
Substrate support with controlled sealing gap
APPLIED MATERIALS INC3 citations72
US9478447B2Oct 25, 2016
Substrate support with wire mesh plasma containment
APPLIED MATERIALS INC0 citations51
TZU GWO-CHUAN
3 patentsUS9490150B2Nov 8, 2016
Substrate support for substrate backside contamination control
TZU GWO-CHUAN17 citations82
US8920564B2Dec 30, 2014
Methods and apparatus for thermal based substrate processing with variable temperature capability
TZU GWO-CHUAN4 citations69
US9783889B2Oct 10, 2017
Apparatus for variable substrate temperature control
TZU GWO-CHUAN1 citations50