Inventor
TZU GWO-CHUAN
US22 patents
⚠️ This page may combine multiple inventors who share the name “TZU GWO-CHUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
17 patentsUS6878206B2Apr 12, 2005
Lid assembly for a processing system to facilitate sequential deposition techniques
APPLIED MATERIALS INC715 citations99
US6589352B1Jul 8, 2003
Self aligning non contact shadow ring process kit
APPLIED MATERIALS INC566 citations98
US6866746B2Mar 15, 2005
Clamshell and small volume chamber with fixed substrate support
APPLIED MATERIALS INC130 citations97
US6050446AApr 18, 2000
Pivoting lid assembly for a chamber
APPLIED MATERIALS INC69 citations95
US7905959B2Mar 15, 2011
Lid assembly for a processing system to facilitate sequential deposition techniques
APPLIED MATERIALS INC27 citations92
US10280509B2May 7, 2019
Lid assembly for a processing system to facilitate sequential deposition techniques
APPLIED MATERIALS INC6 citations84
US9633889B2Apr 25, 2017
Substrate support with integrated vacuum and edge purge conduits
APPLIED MATERIALS INC10 citations83
US8342119B2Jan 1, 2013
Self aligning non contact shadow ring process kit
APPLIED MATERIALS INC11 citations83
US10793951B2Oct 6, 2020
Apparatus to improve substrate temperature uniformity
APPLIED MATERIALS INC3 citations73
US9957615B2May 1, 2018
Apparatus to improve substrate temperature uniformity
APPLIED MATERIALS INC4 citations73
US10857655B2Dec 8, 2020
Substrate support plate with improved lift pin sealing
APPLIED MATERIALS INC3 citations72
US9916994B2Mar 13, 2018
Substrate support with multi-piece sealing surface
APPLIED MATERIALS INC2 citations72
US9543186B2Jan 10, 2017
Substrate support with controlled sealing gap
APPLIED MATERIALS INC3 citations72
US9587310B2Mar 7, 2017
Lid assembly for a processing system to facilitate sequential deposition techniques
APPLIED MATERIALS INC1 citations63
US6500263B2Dec 31, 2002
Semiconductor substrate processing chamber having interchangeable lids actuating plural gas interlock levels
APPLIED MATERIALS INC3 citations57
US11955362B2Apr 9, 2024
Substrate support for reduced damage substrate backside
APPLIED MATERIALS INC0 citations52
US9478447B2Oct 25, 2016
Substrate support with wire mesh plasma containment
APPLIED MATERIALS INC0 citations51
TZU GWO-CHUAN
3 patentsUS9490150B2Nov 8, 2016
Substrate support for substrate backside contamination control
TZU GWO-CHUAN17 citations82
US8920564B2Dec 30, 2014
Methods and apparatus for thermal based substrate processing with variable temperature capability
TZU GWO-CHUAN4 citations69
US9783889B2Oct 10, 2017
Apparatus for variable substrate temperature control
TZU GWO-CHUAN1 citations50