Inventor
MIGNOT YANN A
US8 patents
Patents
8 patentsUS8927442B1Jan 6, 2015
SiCOH hardmask with graded transition layers
IBM33 citations92
US10157789B2Dec 18, 2018
Via formation using sidewall image transfer process to define lateral dimension
IBM12 citations83
US9490168B1Nov 8, 2016
Via formation using sidewall image transfer process to define lateral dimension
IBM10 citations83
US9916986B2Mar 13, 2018
Single or mutli block mask management for spacer height and defect reduction for BEOL
IBM2 citations72
US9859426B1Jan 2, 2018
Semiconductor device including optimized elastic strain buffer
IBM2 citations72
US10395936B2Aug 27, 2019
Wafer element with an adjusted print resolution assist feature
IBM0 citations51
US10395938B2Aug 27, 2019
Wafer element with an adjusted print resolution assist feature
IBM0 citations51
US10170326B2Jan 1, 2019
Wafer element with an adjusted print resolution assist feature
IBM0 citations51