Inventor

HSIEH TSEH-JEN

US25 patents

⚠️ This page may combine multiple inventors who share the name “HSIEH TSEH-JEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HSIEH TSEH-JEN

AXCELIS TECH INC

Liquid metal ion source

Reduced trace metals contamination ion source for an ion implantation system

In-situ cleaning using hydrogen peroxide as co-gas to primary dopant or purge gas for minimizing carbon deposits in an ion source

Multi-piece electrode aperture

Hydrogen co-gas when using aluminum iodide as an ion source material

Hydrogen bleed gas for an ion source housing

Ion source repeller shield comprising a labyrinth seal

Hydrogen generator for an ion implanter

Hydrogen generator for an ion implanter

Phosphine co-gas for carbon implants

Phosphorous trifluoride co-gas for carbon implants

Ion source liner having a lip for ion implantation systems

Lanthanated tungsten ion source and beamline components

Ion source cathode shield

APPLIED MATERIALS INC

Ion source with single-slot tubular cathode

Single-slot tubular cathode

Ion source with single-slot tubular cathode

Particle yield via beam-line pressure control

Model-based controlled load lock pumping scheme

Cyclotron having continuously variable energy output

Dose cup assembly for an ion implanter

COLVIN NEIL K

Automatic control system for selection and optimization of co-gas flow levels

Implementation of co-gases for germanium and boron ion implants

Hydrogen COGas for carbon implant

LEE WILLIAM D

Carbon implantation process and carbon ion precursor composition