Inventor
TAKAKURA NOBURU
JP12 patents
⚠️ This page may combine multiple inventors who share the name “TAKAKURA NOBURU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
11 patentsUS6333786B1Dec 25, 2001
Aligning method
CANON KK60 citations96
US5543921AAug 6, 1996
Aligning method utilizing reliability weighting coefficients
CANON KK96 citations96
US6097495AAug 1, 2000
Aligning method
CANON KK13 citations73
US11061335B2Jul 13, 2021
Information processing apparatus, storage medium, lithography apparatus, lithography system, and article manufacturing method
CANON KK3 citations72
US12307643B2May 20, 2025
Processing apparatus, measurement apparatus, lithography apparatus, method of manufacturing article, model, processing method, measurement method, generation method, and generation apparatus
CANON KK0 citations57
US9880475B2Jan 30, 2018
Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing method
CANON KK0 citations49
US9423700B2Aug 23, 2016
Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing method
CANON KK1 citations49
US12148181B2Nov 19, 2024
Measurement apparatus that measures position information of measurement target in predetermined direction
CANON KK0 citations48
US10372033B2Aug 6, 2019
Imprint apparatus, and method of manufacturing article
CANON KK0 citations41
US10754257B2Aug 25, 2020
Method of manufacturing pattern and article manufacturing method
CANON KK0 citations40
US10359711B2Jul 23, 2019
Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing method
CANON KK0 citations30