Inventor
KITSUKI HIROHIKO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “KITSUKI HIROHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
9 patentsUS7442929B2Oct 28, 2008
Scanning electron microscope
HITACHI HIGH TECH CORP10 citations83
US9811897B2Nov 7, 2017
Defect observation method and defect observation device
HITACHI HIGH TECH CORP3 citations72
US11211226B2Dec 28, 2021
Pattern cross-sectional shape estimation system and program
HITACHI HIGH TECH CORP1 citations62
US7807966B2Oct 5, 2010
Scanning electron microscope
HITACHI HIGH TECH CORP2 citations62
US11164720B2Nov 2, 2021
Scanning electron microscope and calculation method for three-dimensional structure depth
HITACHI HIGH TECH CORP0 citations51
US12564016B2Feb 24, 2026
Defect observation method, apparatus, and program
HITACHI HIGH TECH CORP0 citations49
US11557457B2Jan 17, 2023
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations49
US11195694B2Dec 7, 2021
Charged particle beam system, method for determining range for automatically searching for focal point position in charged particle beam device, and non-transitory storage medium recording program for causing computer system to determine range for automatically searching for focal position in charged particle beam device
HITACHI HIGH TECH CORP0 citations48
US8859962B2Oct 14, 2014
Charged-particle microscope
HITACHI HIGH TECH CORP0 citations40