Inventor
SEKI TAKAYOSHI
JP20 patents
⚠️ This page may combine multiple inventors who share the name “SEKI TAKAYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
15 patentsUS5945681AAug 31, 1999
Ion implanting apparatus capable of preventing discharge flaw production on reverse side surface of wafer
HITACHI LTD53 citations96
US5064520ANov 12, 1991
Method and apparatus for forming a film
HITACHI LTD78 citations95
US6043499AMar 28, 2000
Charge-up prevention method and ion implanting apparatus
HITACHI LTD18 citations92
US5925886AJul 20, 1999
Ion source and an ion implanting apparatus using it
HITACHI LTD22 citations92
US5053678AOct 1, 1991
Microwave ion source
HITACHI LTD48 citations92
US10548212B2Jan 28, 2020
Accelerator and particle beam irradiation system
HITACHI LTD13 citations84
US10306745B2May 28, 2019
Accelerator and particle beam irradiation system
HITACHI LTD9 citations82
US11570881B2Jan 31, 2023
Circular accelerator, particle therapy system with circular accelerator, and method of operating circular accelerator
HITACHI LTD4 citations71
US10117320B2Oct 30, 2018
Accelerator and particle beam irradiation system
HITACHI LTD5 citations71
US6614190B2Sep 2, 2003
Ion implanter
HITACHI LTD5 citations62
US6104025AAug 15, 2000
Ion implanting apparatus capable of preventing discharge flaw production on reverse side surface of wafer
HITACHI LTD4 citations62
US11849533B2Dec 19, 2023
Circular accelerator, particle therapy system with circular accelerator, and method of operating circular accelerator
HITACHI LTD1 citations59
US5729027AMar 17, 1998
Ion implanter
HITACHI LTD0 citations52
US12324088B2Jun 3, 2025
Ion source, circular accelerator using same, and particle beam therapy system
HITACHI LTD0 citations51
US11291105B2Mar 29, 2022
Particle beam accelerator and particle therapy system
HITACHI LTD0 citations49