Inventor
SHORTT DAVID
US10 patents
⚠️ This page may combine multiple inventors who share the name “SHORTT DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
7 patentsUS7304310B1Dec 4, 2007
Methods and systems for inspecting a specimen using light scattered in different wavelength ranges
KLA TENCOR TECH CORP89 citations97
US7463349B1Dec 9, 2008
Systems and methods for determining a characteristic of a specimen
KLA TENCOR TECH CORP24 citations92
US7554656B2Jun 30, 2009
Methods and systems for inspection of a wafer
KLA TENCOR TECH CORP11 citations83
US7489393B2Feb 10, 2009
Enhanced simultaneous multi-spot inspection and imaging
KLA TENCOR TECH CORP19 citations83
US7436505B2Oct 14, 2008
Computer-implemented methods and systems for determining a configuration for a light scattering inspection system
KLA TENCOR TECH CORP12 citations80
US7697129B2Apr 13, 2010
Systems and methods for inspecting a wafer with increased sensitivity
KLA TENCOR TECH CORP6 citations73
US7372559B2May 13, 2008
Systems and methods for inspecting a wafer with increased sensitivity
KLA TENCOR TECH CORP6 citations73