Inventor
BIELLAK STEPHEN
US35 patents
⚠️ This page may combine multiple inventors who share the name “BIELLAK STEPHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
22 patentsUS9891177B2Feb 13, 2018
TDI sensor in a darkfield system
KLA TENCOR CORP56 citations96
US9355440B1May 31, 2016
Detection of selected defects in relatively noisy inspection data
KLA TENCOR CORP28 citations94
US7623229B1Nov 24, 2009
Systems and methods for inspecting wafers
KLA TENCOR CORP22 citations92
US7912658B2Mar 22, 2011
Systems and methods for determining two or more characteristics of a wafer
KLA TENCOR CORP19 citations84
US10488348B2Nov 26, 2019
Wafer inspection
KLA TENCOR CORP3 citations72
US10462391B2Oct 29, 2019
Dark-field inspection using a low-noise sensor
KLA TENCOR CORP5 citations70
US9841512B2Dec 12, 2017
System and method for reducing radiation-induced false counts in an inspection system
KLA TENCOR CORP2 citations70
US10690599B1Jun 23, 2020
Radiation-induced false count mitigation and detector cooling
KLA TENCOR CORP2 citations65
US9460886B2Oct 4, 2016
High resolution high quantum efficiency electron bombarded CCD or CMOS imaging sensor
KLA TENCOR CORP2 citations62
US10923526B2Feb 16, 2021
Multi-pass imaging using image sensors with variably biased channel-stop contacts for identifying defects in a semiconductor die
KLA TENCOR CORP0 citations55
US9646379B1May 9, 2017
Detection of selected defects in relatively noisy inspection data
KLA TENCOR CORP0 citations52
US9915622B2Mar 13, 2018
Wafer inspection
KLA TENCOR CORP0 citations51
US9194812B2Nov 24, 2015
Illumination energy management in surface inspection
KLA TENCOR CORP0 citations51
US8786850B2Jul 22, 2014
Illumination energy management in surface inspection
KLA TENCOR CORP0 citations51
US9182358B2Nov 10, 2015
Multi-spot defect inspection system
KLA TENCOR CORP1 citations50
US10241217B2Mar 26, 2019
System and method for reducing radiation-induced false counts in an inspection system
KLA TENCOR CORP0 citations49
US10734438B2Aug 4, 2020
Spread-spectrum clock-signal adjustment for image sensors
KLA TENCOR CORP0 citations48
US10903258B2Jan 26, 2021
Image sensors with grounded or otherwise biased channel-stop contacts
KLA TENCOR CORP0 citations47
US9404873B2Aug 2, 2016
Wafer inspection with multi-spot illumination and multiple channels
KLA TENCOR CORP0 citations42
US9666419B2May 30, 2017
Image intensifier tube design for aberration correction and ion damage reduction
KLA TENCOR CORP0 citations41
US9086389B2Jul 21, 2015
Sample inspection system detector
KLA TENCOR CORP0 citations41
US9678350B2Jun 13, 2017
Laser with integrated multi line or scanning beam capability
KLA TENCOR CORP0 citations40
BIELLAK STEPHEN
4 patentsUS8629384B1Jan 14, 2014
Photomultiplier tube optimized for surface inspection in the ultraviolet
BIELLAK STEPHEN42 citations92
US8169613B1May 1, 2012
Segmented polarizer for optimizing performance of a surface inspection system
BIELLAK STEPHEN23 citations92
US8520208B1Aug 27, 2013
Segmented polarizer for optimizing performance of a surface inspection system
BIELLAK STEPHEN9 citations83
US8294887B1Oct 23, 2012
Fast laser power control with improved reliability for surface inspection
BIELLAK STEPHEN11 citations83
KLA TENCOR TECH CORP
4 patentsUS7463349B1Dec 9, 2008
Systems and methods for determining a characteristic of a specimen
KLA TENCOR TECH CORP24 citations92
US7554656B2Jun 30, 2009
Methods and systems for inspection of a wafer
KLA TENCOR TECH CORP11 citations83
US7489393B2Feb 10, 2009
Enhanced simultaneous multi-spot inspection and imaging
KLA TENCOR TECH CORP19 citations83
US7746459B2Jun 29, 2010
Systems configured to inspect a wafer
KLA TENCOR TECH CORP7 citations72