Inventor

BURGESS JEFFREY A

US5 patents

⚠️ This page may combine multiple inventors who share the name “BURGESS JEFFREY A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT

2 patents

US6984831B2Jan 10, 2006

Gas flow restricting cathode system for ion implanter and related method

VARIAN SEMICONDUCTOR EQUIPMENT2 citations60

US7559557B2Jul 14, 2009

Sealing between vacuum chambers

VARIAN SEMICONDUCTOR EQUIPMENT2 citations57

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

2 patents

US10153127B1Dec 11, 2018

Low profile extraction electrode assembly

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations47

US9818575B2Nov 14, 2017

Low profile extraction electrode assembly

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations47

AXCELIS TECH INC

1 patent

US6525326B1Feb 25, 2003

System and method for removing particles entrained in an ion beam

AXCELIS TECH INC15 citations80