Inventor
LIU ERIC JEN CHENG
US7 patents
Patents
7 patentsUS9790595B2Oct 17, 2017
Method and system to reduce outgassing in a reaction chamber
ASM IP HOLDING BV471 citations97
US8993054B2Mar 31, 2015
Method and system to reduce outgassing in a reaction chamber
ASM IP HOLDING BV531 citations97
US10927459B2Feb 23, 2021
Systems and methods for atomic layer deposition
ASM IP HOLDING BV3 citations70
US12295163B2May 6, 2025
Formation of gate stacks comprising a threshold voltage tuning layer
ASM IP HOLDING BV1 citations60
US11814727B2Nov 14, 2023
Systems and methods for atomic layer deposition
ASM IP HOLDING BV0 citations60
US12378667B2Aug 5, 2025
Methods and systems for forming doped silicon nitride films
ASM IP HOLDING BV0 citations43
US12532689B2Jan 20, 2026
Method and apparatus for controlling a liquid
ASM IP HOLDING BV0 citations42