Inventor
CHO CHE HOO
KR20 patents
Patents
20 patentsUS11173439B2Nov 16, 2021
Flow path switching type collecting apparatus of by-product for semiconductor manufacturing process
MILAEBO CO LTD7 citations82
US11117086B2Sep 14, 2021
Apparatus for collecting by-product of semiconductor manufacturing process
MILAEBO CO LTD7 citations82
US7988755B2Aug 2, 2011
Byproduct collecting apparatus of semiconductor apparatus
MILAEBO CO LTD8 citations80
US11872515B2Jan 16, 2024
Apparatus for trapping of reaction by-product capable of expanding the area for collection by inducing gas flow
MILAEBO CO LTD5 citations74
US11872516B2Jan 16, 2024
Apparatus for trapping of reaction by-product with extended available collection area
MILAEBO CO LTD3 citations73
US11623175B1Apr 11, 2023
Apparatus for trapping of reaction by-product having self regenerating function for used inner collecting tower
MILAEBO CO LTD5 citations72
US10801107B2Oct 13, 2020
Apparatus for collecting by-product in semiconductor process
MILAEBO CO LTD3 citations71
US11555243B2Jan 17, 2023
Apparatus for trapping reaction by-product produced during organic film deposition process
MILAEBO CO LTD3 citations70
US10987619B2Apr 27, 2021
Apparatus for collecting by-product in semiconductor manufacturing process
MILAEBO CO LTD2 citations70
US11054174B2Jul 6, 2021
Semiconductor process by-product collecting device
MILAEBO CO LTD6 citations69
US7892320B2Feb 22, 2011
Automatically replaceable apparatus for collecting byproducts and the controlling method thereof in equipment producing semiconductor
MILAEBO CO LTD4 citations61
US12451368B2Oct 21, 2025
Process stop loss reduction system through rapid replacement of apparatus for trapping of reaction by-product for semiconductor process
MILAEBO CO LTD0 citations51
US12195849B2Jan 14, 2025
Apparatus for trapping multiple reaction by-products for semiconductor process
MILAEBO CO LTD0 citations51
US12104247B2Oct 1, 2024
Apparatus for trapping multiple reaction by-products for semiconductor process
MILAEBO CO LTD0 citations51
US12030007B2Jul 9, 2024
Apparatus for trapping reaction by-product created by etching process
MILAEBO CO LTD0 citations51
US11462421B2Oct 4, 2022
Apparatus for collecting by-product of semiconductor manufacturing process
MILAEBO CO LTD0 citations51
US11562943B2Jan 24, 2023
Apparatus for collecting by-product in semiconductor manufacturing process
MILAEBO CO LTD0 citations49
US11462422B2Oct 4, 2022
Apparatus having cooling line for collecting by-product in semiconductor manufacturing process
MILAEBO CO LTD0 citations49
US12438010B2Oct 7, 2025
Apparatus for collecting by-product for semiconductor manufacturing process with improved collection space efficiency
MILAEBO CO LTD0 citations46
US12305626B2May 20, 2025
Reactive by-products collection system
MILAEBO CO LTD0 citations42