Inventor
PARK GYEONG MIN
JP10 patents
⚠️ This page may combine multiple inventors who share the name “PARK GYEONG MIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS12354849B2Jul 8, 2025
Plasma processing apparatus
TOKYO ELECTRON LTD1 citations61
US12469738B2Nov 11, 2025
Substrate support, plasma processing apparatus, and ring replacement method
TOKYO ELECTRON LTD0 citations60
US12165893B2Dec 10, 2024
Substrate processing system and transfer method
TOKYO ELECTRON LTD0 citations50
US12482638B2Nov 25, 2025
Substrate processing apparatus and shutter
TOKYO ELECTRON LTD0 citations46
US12165854B2Dec 10, 2024
Substrate support and substrate processing apparatus
TOKYO ELECTRON LTD0 citations46
US12308221B2May 20, 2025
Substrate processing system and method for installing edge ring
TOKYO ELECTRON LTD0 citations43