P

Inventor

CHEN YEN-LIANG

TW57 patents
⚠️ This page may combine multiple inventors who share the name “CHEN YEN-LIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

19 patents
US10990023B1Apr 27, 2021

Method and apparatus for diffraction-based overlay measurement

TAIWAN SEMICONDUCTOR MFG CO LTD22 citations94
US12062166B2Aug 13, 2024

Method and system for diagnosing a semiconductor wafer

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11841622B2Dec 12, 2023

Method and apparatus for diffraction-based overlay measurement

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11791141B2Oct 17, 2023

System and method for residual gas analysis

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11275314B2Mar 15, 2022

Method and apparatus for diffraction-based overlay measurement

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11243475B2Feb 8, 2022

Overlay measurement structures with variable width/pitch for measuring overlay errors

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10983005B2Apr 20, 2021

Spectroscopic overlay metrology

TAIWAN SEMICONDUCTOR MFG CO LTD6 citations73
US10795268B2Oct 6, 2020

Method and apparatus for measuring overlay errors using overlay measurement patterns

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9766554B2Sep 19, 2017

Method and apparatus for estimating focus and dose of an exposure process

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11119416B2Sep 14, 2021

Method for forming semiconductor structure and overlay error estimation

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations68
US12461456B2Nov 4, 2025

Method and structure for overlay measurement in semiconductor device manufacturing

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12354857B2Jul 8, 2025

System and method for residual gas analysis

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12176193B2Dec 24, 2024

System and method for residual gas analysis

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11656391B2May 23, 2023

Aperture design and methods thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11449984B2Sep 20, 2022

Method and system for diagnosing a semiconductor wafer

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11158040B2Oct 26, 2021

Method for identifying robot arm responsible for wafer scratch

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12296428B2May 13, 2025

Chemical mechanical polishing apparatus and method

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10755405B2Aug 25, 2020

Method and system for diagnosing a semiconductor wafer

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10663633B2May 26, 2020

Aperture design and methods thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52

INNOLUX CORP

9 patents

MEDIATEK INC

6 patents

CHEN YEN-LIANG

4 patents

VIA TECH INC

2 patents

HOU HUI-FANG

2 patents

(unassigned)

1 patent

YIN ZHENG

1 patent

LITE ON ELECTRONICS GUANGZHOU

1 patent

WANG TZU-CHANG

1 patent

CHEN CHENG-MING

1 patent

ADVANCED SEMICONDUCTOR ENG

1 patent

BALLER MARTIJN

1 patent

IND TECH RES INST

1 patent

Showing the top 50 of 57 patents by PatentIndex Score.