Inventor
JANG SANG SHIN
KR11 patents
Patents
11 patentsUS10199263B2Feb 5, 2019
Semiconductor devices and methods of manufacturing the same
SAMSUNG ELECTRONICS CO LTD7 citations82
US10304734B2May 28, 2019
Semiconductor devices and methods of manufacturing the same
SAMSUNG ELECTRONICS CO LTD2 citations72
US10062609B2Aug 28, 2018
Semiconductor devices and methods of manufacturing the same
SAMSUNG ELECTRONICS CO LTD2 citations72
US12218002B2Feb 4, 2025
Semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations61
US11881430B2Jan 23, 2024
Semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations61
US11348827B2May 31, 2022
Semiconductor device and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD0 citations61
US10916437B2Feb 9, 2021
Methods of forming micropatterns and substrate processing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations51
US10832948B2Nov 10, 2020
Semiconductor device and method for fabricating the same
SAMSUNG ELECTRONICS CO LTD0 citations51
US10777449B2Sep 15, 2020
Methods of manufacturing semiconductor devices
SAMSUNG ELECTRONICS CO LTD0 citations51
US10658231B2May 19, 2020
Semiconductor device with air gap between wires and method for fabricating the same
SAMSUNG ELECTRONICS CO LTD0 citations51
US12490481B2Dec 2, 2025
Semiconductor devices and methods for fabricating the same
SAMSUNG ELECTRONICS CO LTD0 citations45