P

Inventor

XU YI

CN258 patents
⚠️ This page may combine multiple inventors who share the name “XU YI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHARTERED SEMICONDUCTOR MFG

21 patents
US6436824B1Aug 20, 2002

Low dielectric constant materials for copper damascene

CHARTERED SEMICONDUCTOR MFG175 citations99
US6348407B1Feb 19, 2002

Method to improve adhesion of organic dielectrics in dual damascene interconnects

CHARTERED SEMICONDUCTOR MFG250 citations99
US6265321B1Jul 24, 2001

Air bridge process for forming air gaps

CHARTERED SEMICONDUCTOR MFG148 citations99
US6683002B1Jan 27, 2004

Method to create a copper diffusion deterrent interface

CHARTERED SEMICONDUCTOR MFG71 citations98
US6358842B1Mar 19, 2002

Method to form damascene interconnects with sidewall passivation to protect organic dielectrics

CHARTERED SEMICONDUCTOR MFG141 citations98
US6165891ADec 26, 2000

Damascene structure with reduced capacitance using a carbon nitride, boron nitride, or boron carbon nitride passivation layer, etch stop layer, and/or cap layer

CHARTERED SEMICONDUCTOR MFG87 citations98
US6331479B1Dec 18, 2001

Method to prevent degradation of low dielectric constant material in copper damascene interconnects

CHARTERED SEMICONDUCTOR MFG84 citations97
US6124194ASep 26, 2000

Method of fabrication of anti-fuse integrated with dual damascene process

CHARTERED SEMICONDUCTOR MFG90 citations97
US6424044B1Jul 23, 2002

Use of boron carbide as an etch-stop and barrier layer for copper dual damascene metallization

CHARTERED SEMICONDUCTOR MFG99 citations96
US6352921B1Mar 5, 2002

Use of boron carbide as an etch-stop and barrier layer for copper dual damascene metallization

CHARTERED SEMICONDUCTOR MFG64 citations95
US6117747ASep 12, 2000

Integration of MOM capacitor into dual damascene process

CHARTERED SEMICONDUCTOR MFG73 citations95
US6690091B1Feb 10, 2004

Damascene structure with reduced capacitance using a boron carbon nitride passivation layer, etch stop layer, and/or cap layer

CHARTERED SEMICONDUCTOR MFG29 citations93
US6350675B1Feb 26, 2002

Integration of silicon-rich material in the self-aligned via approach of dual damascene interconnects

CHARTERED SEMICONDUCTOR MFG55 citations93
US6720204B2Apr 13, 2004

Method of using hydrogen plasma to pre-clean copper surfaces during Cu/Cu or Cu/metal bonding

CHARTERED SEMICONDUCTOR MFG38 citations92
US6475810B1Nov 5, 2002

Method of manufacturing embedded organic stop layer for dual damascene patterning

CHARTERED SEMICONDUCTOR MFG24 citations92
US6429117B1Aug 6, 2002

Method to create copper traps by modifying treatment on the dielectrics surface

CHARTERED SEMICONDUCTOR MFG21 citations92
US6417088B1Jul 9, 2002

Method of application of displacement reaction to form a conductive cap layer for flip-chip, COB, and micro metal bonding

CHARTERED SEMICONDUCTOR MFG44 citations92
US6378759B1Apr 30, 2002

Method of application of conductive cap-layer in flip-chip, COB, and micro metal bonding

CHARTERED SEMICONDUCTOR MFG37 citations92
US6207554B1Mar 27, 2001

Gap filling process in integrated circuits using low dielectric constant materials

CHARTERED SEMICONDUCTOR MFG39 citations90
US6350689B1Feb 26, 2002

Method to remove copper contamination by using downstream oxygen and chelating agent plasma

CHARTERED SEMICONDUCTOR MFG15 citations84
US5930677AJul 27, 1999

Method for reducing microloading in an etchback of spin-on-glass or polymer

CHARTERED SEMICONDUCTOR MFG17 citations79

GEN ELECTRIC

4 patents

ZOOX INC

3 patents

BEIJING JINGDONG SHANGKE INFORMATION TECHNOLOGY CO LTD

2 patents

CAPSO VISION INC

2 patents

TEXAS A & M UNIV SYS

2 patents

VERKADA INC

2 patents

PIXTECH INC

1 patent

KUMAR SHANKAR

1 patent

TEXAS A & M UNIVERISITY SYSTEM

1 patent

CHINA PETROCHEMICAL CORP

1 patent

JIANGSU JIANGHUAI ENGINE CO LT

1 patent

JIANGSU JIANGHUAI ENGINE CO LTD

1 patent

XU YI

1 patent

CAPSOVISION INC

1 patent

ADVANCED MICRO DEVICES INC

1 patent

INNOCOM TECH SHENZHEN CO LTD

1 patent

AGRAWAL AMIT

1 patent

GOVERNING COUNCIL UNIV TORONTO

1 patent

SHENZHEN DORABOT INC

1 patent

ALIBABA CHINA CO LTD

1 patent

Showing the top 50 of 258 patents by PatentIndex Score.