Inventor
XIN YUN-BIAO
US11 patents
⚠️ This page may combine multiple inventors who share the name “XIN YUN-BIAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MEMC ELECTRONIC MATERIALS
7 patentsUS6454635B1Sep 24, 2002
Method and apparatus for a wafer carrier having an insert
MEMC ELECTRONIC MATERIALS58 citations95
US6214704B1Apr 10, 2001
Method of processing semiconductor wafers to build in back surface damage
MEMC ELECTRONIC MATERIALS24 citations92
US6709981B2Mar 23, 2004
Method and apparatus for processing a semiconductor wafer using novel final polishing method
MEMC ELECTRONIC MATERIALS52 citations89
US6114245ASep 5, 2000
Method of processing semiconductor wafers
MEMC ELECTRONIC MATERIALS28 citations89
US6200908B1Mar 13, 2001
Process for reducing waviness in semiconductor wafers
MEMC ELECTRONIC MATERIALS38 citations87
US6479386B1Nov 12, 2002
Process for reducing surface variations for polished wafer
MEMC ELECTRONIC MATERIALS22 citations85
US6613591B1Sep 2, 2003
Method of estimating post-polishing waviness characteristics of a semiconductor wafer
MEMC ELECTRONIC MATERIALS12 citations70