Inventor
NUNES SHARON L
US6 patents
Patents
6 patentsUS5340451AAug 23, 1994
Process for producing a metal organic polymer combination
IBM22 citations91
US5286599AFeb 15, 1994
Base developable negative photoresist composition and use thereof
IBM23 citations91
US5229251AJul 20, 1993
Dry developable photoresist containing an epoxide, organosilicon and onium salt
IBM15 citations81
US5141817AAug 25, 1992
Dielectric structures having embedded gap filling RIE etch stop polymeric materials of high thermal stability
IBM18 citations81
US5565529AOct 15, 1996
Dielectric structures having embedded gap filling RIE etch stop polymeric materials of high thermal stability
IBM11 citations73
US5457005AOct 10, 1995
Dry developable photoresist and use thereof
IBM14 citations72