Inventor
MIZUKAMI MASAMI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “MIZUKAMI MASAMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS6210486B1Apr 3, 2001
CVD film forming method in which a film formation preventing gas is supplied in a direction from a rear surface of an object to be processed
TOKYO ELECTRON LTD239 citations98
US5333986AAug 2, 1994
Transfer apparatus
TOKYO ELECTRON LTD82 citations94
US6436203B1Aug 20, 2002
CVD apparatus and CVD method
TOKYO ELECTRON LTD21 citations92
US6089184AJul 18, 2000
CVD apparatus and CVD method
TOKYO ELECTRON LTD35 citations92
US6045862AApr 4, 2000
CVD film forming method in which a film formation preventing gas is supplied in a direction from a rear surface of an object to be processed
TOKYO ELECTRON LTD17 citations92
US6009667AJan 4, 2000
Hinge mechanism for supporting the open-close cover of a vacuum-process apparatus
TOKYO ELECTRON LTD17 citations83
USD424583SMay 9, 2000
Hinge unit for vacuum-processing a semiconductor wafer
TOKYO ELECTRON LTD4 citations61