Inventor
BORG VALERIE
FR2 patents
Patents
2 patentsUS5478453ADec 26, 1995
Process for preparing disilane from monosilane by electric discharge and cryogenic trapping
AIR LIQUIDE24 citations90
US5505913AApr 9, 1996
Process for preparing disilane from monosilane by electric discharge and cryogenic trapping and new reactor for carrying it out
AIR LIQUIDE15 citations80