Inventor
FUKAZAWA YUJI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “FUKAZAWA YUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
12 patentsUS5470393ANov 28, 1995
Semiconductor wafer treating method
TOSHIBA KK70 citations96
US5442236AAug 15, 1995
Semiconductor device having a multilayered wiring structure with dummy wiring
TOSHIBA KK55 citations96
US5571367ANov 5, 1996
Apparatus for subjecting a semiconductor substrate to a washing process
TOSHIBA KK70 citations95
US5810940ASep 22, 1998
Method for cleaning semiconductor wafers
TOSHIBA KK81 citations94
US6423146B1Jul 23, 2002
Method for cleaning a semiconductor substrate
TOSHIBA KK52 citations92
US5527707AJun 18, 1996
Method of analyzing impurities in the surface of a semiconductor wafer
TOSHIBA KK32 citations92
US6152153ANov 28, 2000
Substrate cleaning/drying equipment and substrate cleaning/drying method
TOSHIBA KK28 citations91
US5744402AApr 28, 1998
Method of manufacturing semiconductor devices
TOSHIBA KK26 citations91
US7208831B2Apr 24, 2007
Semiconductor device having multilayer wiring structure and method, wherein connecting portion and wiring layer are formed of same layer
TOSHIBA KK5 citations73
US6291300B1Sep 18, 2001
Manufacturing method of semiconductor devices
TOSHIBA KK10 citations72
US6759314B1Jul 6, 2004
Method for manufacturing semiconductor devices using thermal nitride films as gate insulating films
TOSHIBA KK5 citations60
US6693028B2Feb 17, 2004
Semiconductor device having multilayer wiring structure and method for manufacturing the same
TOSHIBA KK0 citations52