Inventor
ARIMATSU KEIJI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “ARIMATSU KEIJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
8 patentsUS5945681AAug 31, 1999
Ion implanting apparatus capable of preventing discharge flaw production on reverse side surface of wafer
HITACHI LTD53 citations96
US5064520ANov 12, 1991
Method and apparatus for forming a film
HITACHI LTD78 citations95
US4673482AJun 16, 1987
Sputtering apparatus
HITACHI LTD33 citations92
US4618905AOct 21, 1986
DC circuit breaker
HITACHI LTD30 citations91
US6290824B1Sep 18, 2001
Magnetic film forming system
HITACHI LTD27 citations88
US4578730AMar 25, 1986
High-voltage DC circuit breaker apparatus
HITACHI LTD23 citations79
US6104025AAug 15, 2000
Ion implanting apparatus capable of preventing discharge flaw production on reverse side surface of wafer
HITACHI LTD4 citations62
US6491802B2Dec 10, 2002
Magnetic film forming system
HITACHI LTD4 citations58