Inventor

ROMANO ANDREW R

US9 patents

⚠️ This page may combine multiple inventors who share the name “ROMANO ANDREW R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AZ ELECTRONIC MATERIALS USA

3 patents

US7816071B2Oct 19, 2010

Process of imaging a photoresist with multiple antireflective coatings

AZ ELECTRONIC MATERIALS USA19 citations83

US7473512B2Jan 6, 2009

Process of imaging a deep ultraviolet photoresist with a top coating and materials thereof

AZ ELECTRONIC MATERIALS USA18 citations83

US7537879B2May 26, 2009

Photoresist composition for deep UV and process thereof

AZ ELECTRONIC MATERIALS USA3 citations62

ROMANO ANDREW R

2 patents

US8282847B2Oct 9, 2012

Photoresist double patterning

ROMANO ANDREW R483 citations96

US8911587B2Dec 16, 2014

Photoresist double patterning apparatus

ROMANO ANDREW R0 citations50

LAM RES CORP

2 patents

US8361564B2Jan 29, 2013

Protective layer for implant photoresist

LAM RES CORP2 citations62

US7977242B2Jul 12, 2011

Double mask self-aligned double patterning technology (SADPT) process

LAM RES CORP4 citations62

NAT SEMICONDUCTOR CORP

1 patent

US5989763ANov 23, 1999

Chemical gas analysis during processing of chemically amplified photoresist systems

NAT SEMICONDUCTOR CORP20 citations90

DILLON CRAIG T

1 patent

US8956147B2Feb 17, 2015

Mold for rectangular structure

DILLON CRAIG T0 citations34