Inventor
HOFMANN JIM
US16 patents
⚠️ This page may combine multiple inventors who share the name “HOFMANN JIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
15 patentsUS6290572B1Sep 18, 2001
Devices and methods for in-situ control of mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies
MICRON TECHNOLOGY INC162 citations98
US6547640B2Apr 15, 2003
Devices and methods for in-situ control of mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies
MICRON TECHNOLOGY INC76 citations97
US6492273B1Dec 10, 2002
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies
MICRON TECHNOLOGY INC51 citations96
US6468912B2Oct 22, 2002
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies
MICRON TECHNOLOGY INC26 citations96
US6461964B2Oct 8, 2002
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies
MICRON TECHNOLOGY INC28 citations96
US7625495B2Dec 1, 2009
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies
MICRON TECHNOLOGY INC8 citations92
US6699791B2Mar 2, 2004
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies
MICRON TECHNOLOGY INC19 citations92
US6472325B2Oct 29, 2002
Method and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies
MICRON TECHNOLOGY INC23 citations92
US5785569AJul 28, 1998
Method for manufacturing hollow spacers
MICRON TECHNOLOGY INC23 citations92
US7261832B2Aug 28, 2007
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies
MICRON TECHNOLOGY INC3 citations74
US6858538B2Feb 22, 2005
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies
MICRON TECHNOLOGY INC5 citations74
US6720266B2Apr 13, 2004
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies
MICRON TECHNOLOGY INC6 citations74
US7329168B2Feb 12, 2008
Extended Kalman filter incorporating offline metrology
MICRON TECHNOLOGY INC6 citations73
US7087527B2Aug 8, 2006
Extended kalman filter incorporating offline metrology
MICRON TECHNOLOGY INC6 citations73
US7892937B2Feb 22, 2011
Methods of forming capacitors
MICRON TECHNOLOGY INC3 citations62