Inventor
IGGULDEN ROY CHARLES
US4 patents
Patents
4 patentsUS6448173B1Sep 10, 2002
Aluminum-based metallization exhibiting reduced electromigration and method therefor
IBM21 citations91
US6444565B1Sep 3, 2002
Dual-rie structure for via/line interconnections
IBM34 citations90
US6433436B1Aug 13, 2002
Dual-RIE structure for via/line interconnections
IBM22 citations90
US7119545B2Oct 10, 2006
Capacitive monitors for detecting metal extrusion during electromigration
IBM11 citations82