Inventor

KATSUMI SHIHO

JP2 patents

Patents

2 patents

US6483283B2Nov 19, 2002

Semiconductor dynamic quantity-sensor and method of manufacturing the same

FUJI ELECTRIC CO LTD9 citations71

US6281033B1Aug 28, 2001

Semiconductor dynamic quantity-sensor and method of manufacturing the same

FUJI ELECTRIC CO LTD7 citations71