Inventor
HILL RICHARD S
US15 patents
⚠️ This page may combine multiple inventors who share the name “HILL RICHARD S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
10 patentsUS7166531B1Jan 23, 2007
VLSI fabrication processes for introducing pores into dielectric materials
NOVELLUS SYSTEMS INC160 citations97
US6753250B1Jun 22, 2004
Method of fabricating low dielectric constant dielectric films
NOVELLUS SYSTEMS INC103 citations97
US6995439B1Feb 7, 2006
Method of fabricating low dielectric constant dielectric films
NOVELLUS SYSTEMS INC62 citations95
US7799200B1Sep 21, 2010
Selective electrochemical accelerator removal
NOVELLUS SYSTEMS INC21 citations92
US7686927B1Mar 30, 2010
Methods and apparatus for controlled-angle wafer positioning
NOVELLUS SYSTEMS INC26 citations92
US7097410B1Aug 29, 2006
Methods and apparatus for controlled-angle wafer positioning
NOVELLUS SYSTEMS INC28 citations92
US7727863B1Jun 1, 2010
Sonic irradiation during wafer immersion
NOVELLUS SYSTEMS INC33 citations91
US6500321B1Dec 31, 2002
Control of erosion profile and process characteristics in magnetron sputtering by geometrical shaping of the sputtering target
NOVELLUS SYSTEMS INC47 citations91
US7629224B1Dec 8, 2009
VLSI fabrication processes for introducing pores into dielectric materials
NOVELLUS SYSTEMS INC19 citations89
US7972976B1Jul 5, 2011
VLSI fabrication processes for introducing pores into dielectric materials
NOVELLUS SYSTEMS INC7 citations82
MAYER STEVEN T
4 patentsUS8158532B2Apr 17, 2012
Topography reduction and control by selective accelerator removal
MAYER STEVEN T44 citations97
US8470191B2Jun 25, 2013
Topography reduction and control by selective accelerator removal
MAYER STEVEN T19 citations92
US8268154B1Sep 18, 2012
Selective electrochemical accelerator removal
MAYER STEVEN T5 citations73
US8795482B1Aug 5, 2014
Selective electrochemical accelerator removal
MAYER STEVEN T2 citations60