Inventor

NOYORI TAKESHI

JP2 patents

Patents

2 patents

US11220750B2Jan 11, 2022

Shower head and processing device

MEIDENSHA ELECTRIC MFG CO LTD2 citations66

US7772133B2Aug 10, 2010

Method and equipment for forming oxide film

MEIDENSHA ELECTRIC MFG CO LTD2 citations56