Inventor
AHN SANG H
US10 patents
⚠️ This page may combine multiple inventors who share the name “AHN SANG H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS7064078B2Jun 20, 2006
Techniques for the use of amorphous carbon (APF) for various etch and litho integration scheme
APPLIED MATERIALS INC114 citations96
US7718081B2May 18, 2010
Techniques for the use of amorphous carbon (APF) for various etch and litho integration schemes
APPLIED MATERIALS INC17 citations92
US7297376B1Nov 20, 2007
Method to reduce gas-phase reactions in a PECVD process with silicon and organic precursors to deposit defect-free initial layers
APPLIED MATERIALS INC33 citations90
US6927178B2Aug 9, 2005
Nitrogen-free dielectric anti-reflective coating and hardmask
APPLIED MATERIALS INC32 citations90
US7611996B2Nov 3, 2009
Multi-stage curing of low K nano-porous films
APPLIED MATERIALS INC10 citations83
US6559074B1May 6, 2003
Method of forming a silicon nitride layer on a substrate
APPLIED MATERIALS INC19 citations83
US7105460B2Sep 12, 2006
Nitrogen-free dielectric anti-reflective coating and hardmask
APPLIED MATERIALS INC8 citations73
US7547643B2Jun 16, 2009
Techniques promoting adhesion of porous low K film to underlying barrier layer
APPLIED MATERIALS INC6 citations59