Inventor
BENCHER CHRISTOPHER D
US15 patents
⚠️ This page may combine multiple inventors who share the name “BENCHER CHRISTOPHER D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS7807578B2Oct 5, 2010
Frequency doubling using spacer mask
APPLIED MATERIALS INC774 citations98
US6780753B2Aug 24, 2004
Airgap for semiconductor devices
APPLIED MATERIALS INC126 citations96
US7718081B2May 18, 2010
Techniques for the use of amorphous carbon (APF) for various etch and litho integration schemes
APPLIED MATERIALS INC17 citations92
US7811924B2Oct 12, 2010
Air gap formation and integration using a patterning cap
APPLIED MATERIALS INC28 citations90
US6927178B2Aug 9, 2005
Nitrogen-free dielectric anti-reflective coating and hardmask
APPLIED MATERIALS INC32 citations90
US6913868B2Jul 5, 2005
Conductive bi-layer e-beam resist with amorphous carbon
APPLIED MATERIALS INC14 citations83
US7105460B2Sep 12, 2006
Nitrogen-free dielectric anti-reflective coating and hardmask
APPLIED MATERIALS INC8 citations73
US7910476B2Mar 22, 2011
Adhesion and minimizing oxidation on electroless CO alloy films for integration with low K inter-metal dielectric and etch stop
APPLIED MATERIALS INC3 citations62
US7901869B2Mar 8, 2011
Double patterning with a double layer cap on carbonaceous hardmask
APPLIED MATERIALS INC4 citations62
US6797646B2Sep 28, 2004
Method of nitrogen doping of fluorinated silicate glass (FSG) while removing the photoresist layer
APPLIED MATERIALS INC5 citations61
US7846849B2Dec 7, 2010
Frequency tripling using spacer mask having interposed regions
APPLIED MATERIALS INC1 citations52
US10014184B2Jul 3, 2018
Methods and apparatus for forming a resist array using chemical mechanical planarization
APPLIED MATERIALS INC1 citations51