Inventor
WANG YUXIANG MAY
US8 patents
Patents
8 patentsUS6573030B1Jun 3, 2003
Method for depositing an amorphous carbon layer
APPLIED MATERIALS INC1,317 citations98
US6841341B2Jan 11, 2005
Method of depositing an amorphous carbon layer
APPLIED MATERIALS INC78 citations97
US7223526B2May 29, 2007
Method of depositing an amorphous carbon layer
APPLIED MATERIALS INC50 citations96
US7335462B2Feb 26, 2008
Method of depositing an amorphous carbon layer
APPLIED MATERIALS INC24 citations92
US7638440B2Dec 29, 2009
Method of depositing an amorphous carbon film for etch hardmask application
APPLIED MATERIALS INC27 citations90
US7407893B2Aug 5, 2008
Liquid precursors for the CVD deposition of amorphous carbon films
APPLIED MATERIALS INC33 citations90
US6927178B2Aug 9, 2005
Nitrogen-free dielectric anti-reflective coating and hardmask
APPLIED MATERIALS INC32 citations90
US7105460B2Sep 12, 2006
Nitrogen-free dielectric anti-reflective coating and hardmask
APPLIED MATERIALS INC8 citations73