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Inventor
MONKOWSKI JOSEPH RAYMOND
US
2 patents
Patents
2 patents
US7590498B1
Sep 15, 2009
System and method for vacuum chamber leak detection
PIVOTAL SYSTEMS CORP
33 citations
87
US7873052B2
Jan 18, 2011
System and method for controlling process end-point utilizing legacy end-point system
PIVOTAL SYSTEMS CORP
5 citations
57