Inventor
HORIE YUSUKE
JP2 patents
Patents
2 patentsUS7737043B2Jun 15, 2010
Inspection method of compound semiconductor substrate, compound semiconductor substrate, surface treatment method of compound semiconductor substrate, and method of producing compound semiconductor crystal
SUMITOMO ELECTRIC INDUSTRIES5 citations59
US7619301B2Nov 17, 2009
GaAs semiconductor substrate and fabrication method thereof
SUMITOMO ELECTRIC INDUSTRIES2 citations57