Inventor

DUSSART REMI

FR5 patents

⚠️ This page may combine multiple inventors who share the name “DUSSART REMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents

US12131914B2Oct 29, 2024

ST MICROELECTRONICS SA

1 patent

US8012365B2Sep 6, 2011

Deep anisotropic silicon etch method

ST MICROELECTRONICS SA6 citations53

CENTRE NAT RECH SCIENT

1 patent

US7420191B2Sep 2, 2008

Discharge radiation source, in particular UV radiation

CENTRE NAT RECH SCIENT1 citations45

DUSSART REMI

TOKYO ELECTRON LTD

Selective etching with fluorine, oxygen and noble gas containing plasmas

Plasma etching method

Etching method and etching apparatus

ST MICROELECTRONICS SA

Deep anisotropic silicon etch method

CENTRE NAT RECH SCIENT

Discharge radiation source, in particular UV radiation