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Inventor
LIBBERS PAUL
US
2 patents
⚠️ This page may combine multiple inventors who share the name “LIBBERS PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ROHM & HAAS ELECT MAT
1 patent
US7947098B2
May 24, 2011
Method for manufacturing chemical mechanical polishing pad polishing layers having reduced gas inclusion defects
ROHM & HAAS ELECT MAT
11 citations
76
ESBENSHADE JOHN
1 patent
US8118897B2
Feb 21, 2012
Mix head assembly for forming chemical mechanical polishing pads
ESBENSHADE JOHN
0 citations
38