Inventor
SAITO KATSUAKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “SAITO KATSUAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
7 patentsUS5211825AMay 18, 1993
Plasma processing apparatus and the method of the same
HITACHI LTD70 citations96
US5883403AMar 16, 1999
Power semiconductor device
HITACHI LTD29 citations92
US5710442AJan 20, 1998
Semiconductor device and method of manufacturing same
HITACHI LTD53 citations92
US5745336AApr 28, 1998
Capacitor for semiconductor integrated circuit
HITACHI LTD36 citations90
US5434742AJul 18, 1995
Capacitor for semiconductor integrated circuit and method of manufacturing the same
HITACHI LTD23 citations90
US8004075B2Aug 23, 2011
Semiconductor power module including epoxy resin coating
HITACHI LTD13 citations83
US5347100ASep 13, 1994
Semiconductor device, process for the production thereof and apparatus for microwave plasma treatment
HITACHI LTD13 citations73