Inventor
BABA SHUICHI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “BABA SHUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
9 patentsUS8353060B2Jan 8, 2013
Scanning probe microscope and a measuring method using the same
HITACHI LTD10 citations84
US8011230B2Sep 6, 2011
Scanning probe microscope
HITACHI LTD10 citations84
US7966867B2Jun 28, 2011
Scanning probe microscope
HITACHI LTD8 citations84
US7631548B2Dec 15, 2009
Scanning probe microscope
HITACHI LTD10 citations84
US7562564B2Jul 21, 2009
Scanning probe microscope and sample observing method using this and semiconductor device production method
HITACHI LTD11 citations84
US7612889B2Nov 3, 2009
Method and apparatus for measuring displacement of a sample
HITACHI LTD6 citations74
US8342008B2Jan 1, 2013
Scanning probe microscope
HITACHI LTD3 citations62
US7716970B2May 18, 2010
Scanning probe microscope and sample observation method using the same
HITACHI LTD6 citations62
US9417262B2Aug 16, 2016
Scanning probe microscope and sample observation method using same
HITACHI LTD1 citations51
NAKATA TOSHIHIKO
4 patentsUS8629985B2Jan 14, 2014
Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope
NAKATA TOSHIHIKO3 citations62
US8284406B2Oct 9, 2012
Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope
NAKATA TOSHIHIKO3 citations62
US8659761B2Feb 25, 2014
Method and apparatus for measuring displacement of a sample using a wire grid polarizer to generate interference light
NAKATA TOSHIHIKO0 citations52
US8064066B2Nov 22, 2011
Method and apparatus for measuring displacement of a sample to be inspected using an interference light
NAKATA TOSHIHIKO0 citations52