Inventor
GOSEN JEROEN GERARD
NL17 patents
⚠️ This page may combine multiple inventors who share the name “GOSEN JEROEN GERARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
12 patentsUS11139141B2Oct 5, 2021
Systems and methods for thermally conditioning a wafer in a charged particle beam apparatus
ASML NETHERLANDS BV7 citations82
US12217930B2Feb 4, 2025
Systems and methods for thermally conditioning a wafer in a charged particle beam apparatus
ASML NETHERLANDS BV2 citations73
US11804358B2Oct 31, 2023
System and methods for thermally conditioning a wafer in a charged particle beam apparatus
ASML NETHERLANDS BV2 citations71
US9939740B2Apr 10, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations71
US11199771B2Dec 14, 2021
Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus
ASML NETHERLANDS BV2 citations68
US12354891B2Jul 8, 2025
Particle beam inspection apparatus
ASML NETHERLANDS BV0 citations59
US11942340B2Mar 26, 2024
Particle beam inspection apparatus
ASML NETHERLANDS BV0 citations59
US11430678B2Aug 30, 2022
Particle beam inspection apparatus
ASML NETHERLANDS BV0 citations59
US11385556B2Jul 12, 2022
Particle beam apparatus
ASML NETHERLANDS BV0 citations59
US12287570B2Apr 29, 2025
Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus
ASML NETHERLANDS BV0 citations57
US11764027B2Sep 19, 2023
Systems and methods of cooling objective lens of a charged-particle beam system
ASML NETHERLANDS BV0 citations57
US11158484B2Oct 26, 2021
Electron beam inspection tool and method of controlling heat load
ASML NETHERLANDS BV0 citations55
GOSEN JEROEN GERARD
3 patentsUS9013673B2Apr 21, 2015
Lithographic apparatus and device manufacturing method
GOSEN JEROEN GERARD5 citations69
US8755026B2Jun 17, 2014
Lithographic apparatus and a device manufacturing method
GOSEN JEROEN GERARD2 citations59
US8810769B2Aug 19, 2014
Lithographic apparatus, an illumination system, a projection system and a method of manufacturing a device using a lithographic apparatus
GOSEN JEROEN GERARD0 citations47