Inventor

MARTENS ARJAN HUBRECHT JOSEF ANNA

NL6 patents

⚠️ This page may combine multiple inventors who share the name “MARTENS ARJAN HUBRECHT JOSEF ANNA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MARTENS ARJAN HUBRECHT JOSEF ANNA

2 patents

US8508711B2Aug 13, 2013

Lithographic apparatus and device manufacturing method

MARTENS ARJAN HUBRECHT JOSEF ANNA0 citations43

US8319157B2Nov 27, 2012

Lithographic apparatus and device manufacturing method

MARTENS ARJAN HUBRECHT JOSEF ANNA0 citations42

HOEKERD KORNELIS TIJMEN

1 patent

US8432531B2Apr 30, 2013

Lithographic apparatus and a method of operating the apparatus

HOEKERD KORNELIS TIJMEN6 citations65

VAN BOXTEL FRANK JOHANNES JACOBUS

1 patent

US8988657B2Mar 24, 2015

Lithographic apparatus and device manufacturing method

VAN BOXTEL FRANK JOHANNES JACOBUS0 citations41

VAN DER GAAG MARC LÉON

1 patent

US9575406B2Feb 21, 2017

Pump system, a carbon dioxide supply system, an extraction system, a lithographic apparatus and a device manufacturing method

VAN DER GAAG MARC LÉON1 citations37

JANSEN BAUKE

1 patent

US8564757B2Oct 22, 2013

Lithographic apparatus and a method of operating the apparatus

JANSEN BAUKE0 citations32